Three-dimensional design and replication of silicon oxide nanostructures using an atomic force microscope

Atomic force microscope (AFM) based local anodic oxidation of metallic and semiconducting layers has emerged as a powerful tool for nanoscale fabrication. A unique nanoscale patterning technique has been created that couples computer aided design (CAD) with the lithographic capabilities of the AFM. Target nanostructures to be deposited on a silicon substrate are rendered as a three-dimensional model. Using AFM based local anodic oxidation on a silicon substrate, the features are duplicated at the nanoscale using voltage bias, probe speed, and humidity modulation, as prescribed by the model. The work presented herein highlights the advantages when three-dimensional modeling is linked with nanolithography; nanoscale features can be precisely replicated from a design plan. (Some figures in this article are in colour only in the electronic version)